Center for Materials Research

Boron Diffusion Recipes

Boron Disk Drying

 
2 Micron Etch Stop
Process Step
Furnace Setting

Temperature degrees C

Gas Type
Wet/Dry
Gas Flow liters/min.
Time min.
Push
760
800

N2

O2

Dry

Dry

6.75

.0168

10
Stabilize
760
800

N2

O2

Dry

Dry

6.75

0.168

10
Ramp
1125
1125

N2

O2

Dry

Dry

6.75

0.168

30
Deposition
1125
1125

N2

O2

Dry

Dry

6.75

0.168

90
In-Situ LTO
760
Cooling Down

N2

O2

Dry

Dry

3.375

3.375

30
Pull
760
Cooling Down

N2

O2

Dry

Dry

3.375

3.375

10

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