Boron Diffusion
Submitted by jjennings on Thu, 10/23/2008 - 05:28
Experitech 6-Inch Diameter Tube Furnace
We use the lower furnace for boron diffusion and typically we diffuse a 2 micron boron etch stop.
We use the lower furnace for boron diffusion and typically we diffuse a 2 micron boron etch stop.