Center for Materials Research

Cleanroom Process Capabilities

Select from the list below for additional information on specific processes and available equipment.

Thin Films

•Sputter Coating
•Spin Coating

 

Photolithography

•Mask Aligner
•Mask Fabrication

Wet Etching

•Acid
•BOE
•Solvent

 

Thermal Processes

•Rapid Thermal Annealing
•Vertical Furnace
•Oxidation Growth
•Boron Diffusion

Dry Etching

•Plasma
•Reactive Ion
•Deep Reactive Ion

Measurement

•Profilometry
•Ellipsometry

 

Wire Bonding

•Ball
•Wedge

 

 

 


 

Contact us: joshah_jennings@wsu.edu (509) 335-8145 | Accessibility | Copyright | Policies
WSU Microfab Facility, PO Box 642711, Washington State University, Pullman, WA, 99164-2711USA


Contact Us: cmr@wsu.edu | Telephone: (509) 335-1131 | Accessibility | Copyright | Policies
Center for Materials Research, PO Box 642711, Washington State University, Pullman, WA, 99164-2711 USA