Center for Materials Research

Carbon Nanotube Turfs

The SEM image below shows part of an array of 20 micron carbon nanotube turfs that are used as a thermal switch in a MEMS device. The vertically aligned turfs are grown on a sol-gel substrate which is patterned using the photolithography equipment in the cleanroom. The process allows for precise control of the position and size of the nanotube turf, creating arrays of turfs as small as 5 microns to be grown.


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