Center for Materials Research

CLEANROOM

 

 

 

 


Welcome to WSU's

Microfabrication Cleanroom Website!


 

Process Capabilities

Fees

About Us

  

 

 

   

 

Downloads

CLEANROOM USER MANUAL

CLEANROOM ORIENTATION HANDOUT

SPUTTER MACHINE OPERATING INSTRUCTIONS

 

 

 

Keywords: MEMS, NEMS, cleanroom, microfabrication, microelectronics, MEMS sensor, nanotechnology, MEMS sensor, MEMS accelerometer, MEMS switch, photolithography, sputter, mask aligner, ellipsometer, profiler, stylus, profilometer, wet etch, deep reactive ion etching, DRIE, RIE, plasma etching, oxidation, SiO2, boron diffusion, microscopy, AFM, atomic force microscope, SEM, scanning electron microscope, probe, nanoindentation, thin films, bioengineering, microchannel, microfluidics, washington cleanroom, prototype, MEMS technology, micromachining, class 1000, class 100, particle counting, patent, 

 

 

 

 

For further information please contact Joshah Jennings at (509) 335-8145 or joshah_jennings@wsu.edu

 

Contact Us: cmr@wsu.edu | Telephone: (509) 335-1131 | Accessibility | Copyright | Policies
Center for Materials Research, PO Box 642711, Washington State University, Pullman, WA, 99164-2711 USA